SRIM simulation data underlying the PhD thesis "Quantum sensing and fabrication of color centers in diamond: Toward a quantum biosensor based on CMOS-integrated NV centers"

DOI:10.4121/e0ee9a7f-b71c-420a-adb5-dca482fc8902.v1
The DOI displayed above is for this specific version of this dataset, which is currently the latest. Newer versions may be published in the future. For a link that will always point to the latest version, please use
DOI: 10.4121/e0ee9a7f-b71c-420a-adb5-dca482fc8902

Datacite citation style

Varveris, Ioannis (2025): SRIM simulation data underlying the PhD thesis "Quantum sensing and fabrication of color centers in diamond: Toward a quantum biosensor based on CMOS-integrated NV centers". Version 1. 4TU.ResearchData. dataset. https://doi.org/10.4121/e0ee9a7f-b71c-420a-adb5-dca482fc8902.v1
Other citation styles (APA, Harvard, MLA, Vancouver, Chicago, IEEE) available at Datacite

Dataset

SRIM simulation data for ion implantation into a diamond substrate. SRIM is a simulation software for the interaction of ions incident on a material substrate, very useful in the context of ion implantation.

These simulations were performed prior to the cleanroom processing of a diamond substrate, in order to determine the optimal processing and implantation parameters. This diamond substrate is used as part of the underlying PhD project and is ultimately integrated with CMOS technology into a compact quantum diamond biosensor. The data resulting from the simulations is acquired by running different ion-target material combinations, using TRIM (a sub-module of SRIM).

The data is in the form of .PNG, .TXT, .BMP, .SAV.

History

  • 2025-05-23 first online, published, posted

Publisher

4TU.ResearchData

Format

.PNG / .TXT / .BMP / .SAV

Organizations

TU Delft, Faculty of Electrical Engineering, Mathematics and Computer Science, Department of Quantum & Computer Engineering