cff-version: 1.2.0
abstract: "<p>SRIM simulation data for <strong>ion implantation</strong> into a diamond substrate. SRIM is a simulation software for the interaction of ions incident on a material substrate, very useful in the context of ion implantation. </p><p>These simulations were performed prior to the cleanroom processing of a diamond substrate, in order to determine the optimal processing and implantation parameters. This diamond substrate is used as part of the underlying PhD project and is ultimately integrated with CMOS technology into a compact quantum diamond biosensor. The data resulting from the simulations is acquired by running different ion-target material combinations, using TRIM (a sub-module of SRIM).</p><p>The data is in the form of .PNG, .TXT, .BMP, .SAV.</p>"
authors:
  - family-names: Varveris
    given-names: Ioannis
    orcid: "https://orcid.org/0009-0003-6421-5609"
title: "SRIM simulation data underlying the PhD thesis &#34;Quantum sensing and fabrication of color centers in diamond: Toward a quantum biosensor based on CMOS-integrated NV centers&#34;"
keywords:
version: 1
identifiers:
  - type: doi
    value: 10.4121/e0ee9a7f-b71c-420a-adb5-dca482fc8902.v1
license: CC BY-NC-ND 4.0
date-released: 2025-05-23