Ellipsometry data:
	File type: 	.iSE
	File name: 	YYYYMMDD_SF6-flow_H2-flow_plasma-time_substrate.iSE
	Software:	CompleteEASE
	
	Model used for 

	Description of data:
		Measurement 1: Start
		Measurement 2: Post heat-up step
		Measurement 3 till (2 + plasma time (min)): each after 1 min. SF6/H2/Ar plasma exposure (example: 10 minute plasma treatment: measurement 3-12)
		Remainder of measurements: each after 1 cycle TiO2 ALD
		Last measurement: after final purge

RAIRS data:
	File type: 	.dpt
	File name: 	YYYYMMDD_substrate__reactant-1_dose-time.dpt 				(for 1 reactant)
			YYYYMMDD_substrate__reactant-1_dose-time__reactant-2_dose-time.dpt	(for multiple reactants, if more than 2: name is extended with reactant 3 and its dose time etc.)
	Software:	-
		
	Description of data:
	All files contain difference spectra with respect to the backgrounds listed below.

	File:									Background measured after:
	20230212_Al2O3__BDEAS_1200ms.dpt					thermal stabilisation
	20230212_SiO2__BDEAS_1200ms.dpt						thermal stabilisation
	20240126_Al2O3__SF6-H2-plasma_600s.dpt					thermal stabilisation
	20240126_F-Al2O3__BDEAS_1200ms.dpt					10 min SF6/H2/Ar plasma
	20240126_SiO2__Ar-plasma_660s.dpt					thermal stabilisation
	20240126_SiO2__SF6-H2-plasma_600s.dpt					thermal stabilisation
	20240126_F-SiO2__BDEAS_1200ms.dpt					10 min SF6/H2/Ar plasma
	20240403_F-SiO2__TDMAT_1s.dpt						10 min SF6/H2/Ar plasma
	20240404_F-Al2O3__TDMAT_1s.dpt						10 min SF6/H2/Ar plasma
	20240404_F-SiO2+H2O_10s__TDMAT_1000ms.dpt				10 min SF6/H2/Ar plasma and 10s H2O dose
	20240404_F-SiO2+H2O_10s__TDMAT_2000ms.dpt				10 min SF6/H2/Ar plasma and 10s H2O dose
	20240404_F-SiO2+H2O_10s__TDMAT_3000ms.dpt				10 min SF6/H2/Ar plasma and 10s H2O dose
	20240404_F-SiO2+H2O_10s__TDMAT_3000ms__pump_10min.dpt			10 min SF6/H2/Ar plasma and 10s H2O dose
	

XPS data:
	File type:	.vgd
	File name: 	YYYYMMDD_elemental-orbital-scan.vgd
	Software:	Avantage
	
	Description of data:
		Measured after 10 minute SF6/H2/Ar plasma exposure with a SF6/(SF6+H2) flow ratio of 0.24
	