@misc{https://doi.org/10.4121/a8e32e27-5a91-4a4a-abfc-e5bd884317ae.v1,
  doi = {10.4121/a8e32e27-5a91-4a4a-abfc-e5bd884317ae.v1},
  url = {},
  author = {Herrmann, Yanik and Brevoord, Julia M. and Fischer , Julius and Scheijen, Stijn and Sauerzapf, Colin and Codreanu, Nina and Wienhoven, Leonardo G. C. and van der Graaf, Yuran M. Q. and Wolfs, Cornelis F. J. and Méjard, Régis},
  keywords = {Diamond, Fiber-based Cavity, Optical Cavity, Nitrogen-Vacancy Center, Tin-Vacancy Center, Quantum Optics, Laser-cutting, Quantum Networks, Scanning Cavity Microscopy, Nanofabrication},
  title = {Data and software underlying the publication "Laser-cut Patterned, Micrometer-thin Diamond Membranes with Coherent Color Centers for Open Microcavities"},
  publisher = {4TU.ResearchData},
  year = {2025},
  copyright = {CC BY 4.0},
}