@misc{https://doi.org/10.4121/8caea193-efa6-4cc4-81bf-43ce685863e8.v1,
  doi = {10.4121/8caea193-efa6-4cc4-81bf-43ce685863e8.v1},
  url = {},
  author = {Xu, Minxing and Norte, Richard and Steeneken, Peter and Otte, Sander},
  keywords = {Casimir effect, superconductivity, nanomechanical resonators, high-Q, scanning tunneling microscopy, wafer-scale amorphous thin film},
  title = {Data underlying the PhD thesis:  Probing the effect of superconductivity on the Casimir force on-chip with STM},
  publisher = {4TU.ResearchData},
  year = {2025},
  copyright = {Restrictive Licence},
}