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DOI: 10.4121/21365268

Skoupý, Radim; Boltje, Daan (2023): Full dataset of the article: Robust local thickness estimation of sub-micrometer specimen by 4D-STEM. Version 2. 4TU.ResearchData. dataset. https://doi.org/10.4121/21365268.v2

Version 1 - 2023-02-20

Usage statistics

Categories

• Other Physical Sciences
• Physical Sciences

Keywords

4D-STEM Quantitative STEM analysis sample thickness

Licence

CC0

Interoperability

• RO-Crate Metadata

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by Radim Skoupý, Daan Boltje

Datasets were taken for q4STEM method evaluation (quantitative 4D STEM). It enables in-situ local thickness estimation of amorphous electron transparent samples such as lamellas used in TEM tomography. They are named by the used detector (direct detection STEM; ligth conversion STEM) and the sample (ultrathin section of lung tissue; latex beads; FIB milled stepped lamella - epoxy resin).

History

• 2023-02-20 first online

• 2023-04-06 published, posted

Publisher

4TU.ResearchData

Format

Dataset consists of two data formats:light conversion STEM images: ".tif"direct detection STEM images: ".dat" Individual file naming indicates its coordinates (x,y) in the scanned area.

Associated peer-reviewed publication

Robust local thickness estimation of sub-micrometer specimen by 4D-STEM

Funding

• Czech Science Foundation (project 21-13541S to V.K.)
• Dutch Research Council (NWOTTW no.17152 to J.H.)
• European Research Council (ERC) under the European Union’s Horizon 2020 research and innovation programme (Grant agreement No. ERC-StG-852880 to A.J.)
• KIND Synergy program by the Kavli Institute of Nanoscience Delft (to A.J.).
• ISI authors thank Thermo Fisher Scientific Brno for providing the FIB-SEM Helios equipped with the T-pix detector through the Technology Agency of the Czech Republic (project TN01000008 to V.K.).

Organizations

TU Delft, Faculty of Applied Sciences, Department of Imaging Physics
Czech Academy of Sciences, Institute of Scientific Instruments